Min. Order Reference FOB Price
1 Piece US$1,000,000.00-3,000,000.00 / Piece
Product Description
Product Description Tool Spec Machine Type In-line Sputter PVD I100 Process Chamber 3,6 target (optional) Plasma Source RF for l100 UItimate Vacuum 10-8 Pa Power 8kW,max15kW Carrier Gas Ar,N2 Bias DC Bias (optional) Accompanying Magnet (optional) Substrate Size up to ...